LexDanaLexDanabeta
Inventor

Markus Lieberer

Inventor
Augsburg, DE

Overview

1→
Patents
2020
Patent span
Electricity
Primary field (CPC H)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Lprimary
H01LSemiconductor devices50%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1050%
PatentTitleYear
10,727,140Preheat processes for millisecond anneal system2020

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2020Patents assigned to BEIJING E TOWN SEMICONDUCTOR TECH CO LTD (1)· patent assignee history
2020Patents assigned to MATTSON TECH INC (1)· patent assignee history
2020Based in Augsburg, DE· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
BEIJING E TOWN SEMICONDUCTOR TECH CO LTD12020
MATTSON TECH INC12020
Locations
LocationPatentsSpan
Augsburg, DE12020