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Inventor

JOERG FREDERIK BLUMRICH

Inventor
DE

Overview

2→
Patents
2023–2024
Patent span
Physics
Primary field (CPC G)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices67%
G01NInvestigating or analysing materials by determining their chemical or physical properties33%
PatentTitleYear
11,914,303Apparatus and method for characterizing a microlithographic mask202411,774,870Method for removing a particle from a mask system2023

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2023–2024Patents assigned to ZEISS CARL SMT GMBH (2)· patent assignee history
2023Patents assigned to ZEISS CARL SMS LTD (1)· patent assignee history
2023–2024Based in DE· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
ZEISS CARL SMT GMBH22023–2024
ZEISS CARL SMS LTD12023
Locations
LocationPatentsSpan
DE22023–2024