Inventor
ALEXANDER IGOREVICH ERSHOV
Inventor
US
Overview
Patents· 7 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H05Gprimary
H05GX-ray technique41%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices35%
G02BOptical elements, systems or apparatus12%
F16JPistons6%
F16LPipes6%
PatentTitleYear
12,452,986Nozzle apparatus202512,389,519Guiding device and associated system202512,222,050Robust fluid coupling apparatus202511,846,887Prolonging optical element lifetime in an EUV lithography system202311,822,252Guiding device and associated system202311,690,159Apparatus and method for extending target material delivery system lifetime202311,340,532Prolonging optical element lifetime in an EUV lithography system2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2025Patents assigned to ASML NETHERLANDS BV (7)· patent assignee history
2022–2025Based in US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML NETHERLANDS BV | 7 | 2022–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 7 | 2022–2025 |