Inventor
Yuichi Iwasaki
Inventor
Utsunomiya, JP
Overview
Patents· 14 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices31%
G02BOptical elements, systems or apparatus15%
H01JElectric discharge tubes or discharge lamps15%
B82YSpecific uses or applications of nanostructures12%
C23FNon-mechanical removal of metallic material from surface12%
F16FSprings4%
H02MApparatus for conversion between ac and ac, between ac and dc, or between dc and dc, and for use with mains or similar power supply systems4%
H03KPulse technique4%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h104%
PatentTitleYear
10,476,495Drive device20199,606,460'Lithography apparatus, and method of manufacturing article'20178,484,910'Active dynamic vibration absorber'20138,363,205'Exposure apparatus'20138,035,796'Immersion exposure apparatus and device manufacturing method'20117,679,717'Exposure apparatus'20107,276,707'Deflector, method of manufacturing deflector, and charged particle beam exposure apparatus'20077,018,783'Fine structure and devices employing it'20066,953,938'Deflector, method of manufacturing deflector, and charged particle beam exposure apparatus'20056,930,834'Method of manufacturing diffractive optical element'20056,818,911'Array structure and method of manufacturing the same, charged particle beam exposure apparatus, and device manufacturing method'20046,534,242'Multiple exposure device formation'20036,514,674'Method of forming an optical element'20036,475,704'Method for forming fine structure'2002Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2002–2017Patents assigned to CANON KK (9)· patent assignee history
2002–2017Based in Utsunomiya, JP· patent location history
2004–2007Patents assigned to HITACHI LTD (3)· patent assignee history
2004–2013Based in Tochigi, JP· patent location history
2013Patents assigned to IWASAKI YUICHI (2)· patent assignee history
2013Patents assigned to CANON KABISHIKI KAISHA (1)· patent assignee history
2013Patents assigned to MIYAZAKI MITSURU (1)· patent assignee history
2019Based in Kanagawa, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| CANON KK | 9 | 2002–2017 |
| HITACHI LTD | 3 | 2004–2007 |
| IWASAKI YUICHIself | 2 | 2013 |
| CANON KABISHIKI KAISHA | 1 | 2013 |
| MIYAZAKI MITSURU | 1 | 2013 |
Locations
| Location | Patents | Span |
|---|---|---|
| Utsunomiya, JP | 9 | 2002–2017 |
| Tochigi, JP | 4 | 2004–2013 |
| Kanagawa, JP | 1 | 2019 |