Inventor
David Benjaminson
Inventor
Santa Clara, CA, US
Overview
Patents· 10 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps27%
H01LSemiconductor devices23%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1023%
C23FNon-mechanical removal of metallic material from surface10%
C30BSingle-crystal growth10%
C23CCoating metallic material3%
H05HPlasma technique3%
PatentTitleYear
11,062,887High temperature RF heater pedestals202111,049,755Semiconductor substrate supports with embedded RF shield202110,607,867Bolted wafer chuck thermal management systems and methods for wafer processing systems202010,468,276Thermal management systems and methods for wafer processing systems201910,233,547Methods of etching films with reduced surface roughness201910,147,620Bolted wafer chuck thermal management systems and methods for wafer processing systems20189,896,770'Methods of etching films with reduced surface roughness'20189,741,593'Thermal management systems and methods for wafer processing systems'20179,691,645'Bolted wafer chuck thermal management systems and methods for wafer processing systems'20179,540,736'Methods of etching films with reduced surface roughness'2017Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2017–2021Patents assigned to APPLIED MATERIALS INC (10)· patent assignee history
2017–2021Based in Santa Clara, CA, US· patent location history
2021Based in Campbell, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 10 | 2017–2021 |
Locations
| Location | Patents | Span |
|---|---|---|
| Santa Clara, California, US | 9 | 2017–2021 |
| Campbell, California, US | 1 | 2021 |