Inventor
HIROSHI ICHINOMIYA
Inventor
JP
Overview
Patents· 4 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1036%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices27%
H01LSemiconductor devices27%
B08BCleaning in general9%
PatentTitleYear
11,960,209Developing treatment method and developing treatment apparatus202411,848,189Substrate processing method, recording medium and substrate processing apparatus202311,720,026Developing treatment method, computer storage medium and developing treatment apparatus202311,508,589Substrate processing method, substrate processing apparatus and recording medium2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2024Patents assigned to TOKYO ELECTRON LTD (4)· patent assignee history
2022–2024Based in JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 4 | 2022–2024 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 4 | 2022–2024 |