Inventor
Werner Baer
Inventor
Beverly, MA, US
Overview
Patents· 1 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps50%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1050%
PatentTitleYear
7,105,840'Ion source for use in an ion implanter'2006Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2006Patents assigned to AXCELIS TECH INC (1)· patent assignee history
2006Based in Beverly, MA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| AXCELIS TECH INC | 1 | 2006 |
Locations
| Location | Patents | Span |
|---|---|---|
| Beverly, Massachusetts, US | 1 | 2006 |