Inventor
Eric R. Harrington
Inventor
Ipswich, MA, US
Overview
Patents· 4 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps50%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1038%
G05GControl devices or systems insofar as characterised by mechanical features only13%
PatentTitleYear
7,608,843'Method and apparatus for scanning a workpiece through an ion beam'20096,534,775'Electrostatic trap for particles entrained in an ion beam'20036,525,326'System and method for removing particles entrained in an ion beam'20036,476,399'System and method for removing contaminant particles relative to an ion beam'2002Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2002–2003Patents assigned to AXCELIS TECH INC (3)· patent assignee history
2002–2003Based in Ipswich, MA, US· patent location history
2009Patents assigned to TEL EPION INC (1)· patent assignee history
2009Based in Topsfield, MA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| AXCELIS TECH INC | 3 | 2002–2003 |
| TEL EPION INC | 1 | 2009 |
Locations
| Location | Patents | Span |
|---|---|---|
| Ipswich, Massachusetts, US | 3 | 2002–2003 |
| Topsfield, Massachusetts, US | 1 | 2009 |