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Inventor

AKIHIRO YOKOTA

Inventor
JP

Overview

3→
Patents
2021–2025
Patent span
Electricity
Primary field (CPC H)

Patents· 3 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Jprimary
H01JElectric discharge tubes or discharge lamps30%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1030%
H05HPlasma technique20%
H01LSemiconductor devices10%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1010%
PatentTitleYear
12,381,069Plasma processing apparatus and plasma processing method202512,020,898Plasma processing system and method of processing substrate202411,145,490Plasma processing method2021

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2021–2025Patents assigned to TOKYO ELECTRON LTD (3)· patent assignee history
2021–2025Based in JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD32021–2025
Locations
LocationPatentsSpan
JP32021–2025