Inventor
MICHAEL CARCASI
Inventor
US
Overview
Patents· 14 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1021%
H01LSemiconductor devices18%
G01NInvestigating or analysing materials by determining their chemical or physical properties9%
B05DProcesses for applying fluent materials to surfaces, in general7%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices7%
B05CApparatus for applying fluent materials to surfaces, in general5%
B08BCleaning in general5%
G06TImage data processing or generation, in general5%
G01BMeasuring length, thickness or similar linear dimensions4%
G01JMeasurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light4%
PatentTitleYear
12,488,452Wafer bath imaging202512,424,467Systems and methods for determining a localized fluid velocity on a spinning substrate by tracking movement of a tracer across the spinning substrate202512,226,796Bath systems and methods thereof202512,123,778Thermal imaging sensor for integration into track system202411,998,945Methods and systems to monitor, control, and synchronize dispense systems202411,738,363Bath systems and methods thereof202311,703,459System and method to calibrate a plurality of wafer inspection system (WIS) modules202311,637,031Systems and methods for spin process video analysis during substrate processing202311,624,607Hardware improvements and methods for the analysis of a spinning reflective substrates202311,474,028Systems and methods for monitoring one or more characteristics of a substrate202211,339,733Systems and methods to monitor particulate accumulation for bake chamber cleaning202211,276,157Systems and methods for automated video analysis detection techniques for substrate process202211,262,657System and method of planarization control using a cross-linkable material202211,163,236Method and process for stochastic driven detectivity healing2021Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2021–2025Patents assigned to TOKYO ELECTRON LTD (14)· patent assignee history
2021–2025Based in US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 14 | 2021–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 14 | 2021–2025 |