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Inventor

Takao Inada

Inventor
Hsinchu, TW

Overview

5→
Patents
2015–2020
Patent span
Electricity
Primary field (CPC H)

Patents· 5 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Lprimary
H01LSemiconductor devices42%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1042%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests17%
PatentTitleYear
10,651,061Substrate processing apparatus, substrate processing method and recording medium202010,643,874Substrate liquid processing apparatus, substrate liquid processing method, and storage medium20209,224,624'Liquid processing method'20159,070,549'Substrate processing apparatus and substrate processing method'20158,951,359'Liquid processing apparatus, liquid processing method and computer-readable storage medium storing liquid processing program'2015

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2015–2020Patents assigned to TOKYO ELECTRON LTD (5)· patent assignee history
2015Patents assigned to INADA TAKAO (2)· patent assignee history
2015Patents assigned to HACHIYA YOSUKE (1)· patent assignee history
2015Patents assigned to OKAMURA NAOYUKI (1)· patent assignee history
2015Patents assigned to SHIOKAWA TOSHIYUKI (1)· patent assignee history
2015Based in Hsinchu, TW· patent location history
2015Based in Tosu, JP· patent location history
2020Based in Koshi, JP· patent location history
2020Based in Kumamoto, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD52015–2020
INADA TAKAOself22015
HACHIYA YOSUKE12015
OKAMURA NAOYUKI12015
SHIOKAWA TOSHIYUKI12015
Locations
LocationPatentsSpan
Hsinchu, TW22015
Koshi, JP12020
Kumamoto, JP12020
Tosu, JP12015