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Inventor

Stefan Lanio

Inventor
Erding, DE

Overview

41→
Patents
1988–2021
Patent span
Electricity
Primary field (CPC H)

Patents· 41 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Jprimary
H01JElectric discharge tubes or discharge lamps79%
B82YSpecific uses or applications of nanostructures6%
G01NInvestigating or analysing materials by determining their chemical or physical properties6%
G01RMeasuring electric variables2%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices2%
G21KHandling of particles or ionising radiation not otherwise provided for2%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h102%
Y10TTechnical subjects covered by former us classification2%
PatentTitleYear
11,094,501Secondary charged particle imaging system202110,991,544Charged particle beam device, objective lens module, electrode device, and method of inspecting a specimen202110,699,867Simplified particle emitter and method of operating thereof202010,522,327Method of operating a charged particle beam specimen inspection system201910,168,614On-axis illumination and alignment for charge control during charged particle beam inspection201910,103,004System and method for imaging a secondary charged particle beam with adaptive secondary charged particle optics201810,056,228Charged particle beam specimen inspection system and method for operation thereof20189,953,805System for imaging a secondary charged particle beam with adaptive secondary charged particle optics20189,805,908'Signal charged particle deflection device, signal charged particle detection system, charged particle beam device and method of detection of a signal charged particle beam'20179,697,983'Thermal field emitter tip, electron beam device including a thermal field emitter tip and method for operating an electron beam device'20179,666,405'System for imaging a signal charged particle beam, method for imaging a signal charged particle beam, and charged particle beam device'20179,666,406'Charged particle beam device, system for a charged particle beam device, and method for operating a charged particle beam device'20179,472,373'Beam separator device, charged particle beam device and methods of operating thereof'20169,048,068'Electron beam device with dispersion compensation, and method of operating same'20158,963,083'Switchable multi perspective detector, optics therefore and method of operating thereof'20158,963,084'Contamination reduction electrode for particle detector'20158,816,270'Octopole device and method for spot size improvement'20148,723,117'Switchable multi perspective detector, optics therefor and method of operating thereof'20148,563,927'Shielding member having a charge control electrode, and a charged particle beam apparatus'20138,481,958'Multi-axis lens, beam system making use of the compound lens, and method of manufacturing the compound lens'20138,373,136'Achromatic beam deflector, achromatic beam separator, charged particle device, method of operating an achromatic beam deflector, and method of operating an achromatic beam separator'20138,158,954'Multi-axis lens, beam system making use of the compound lens, and method of manufacturing the compound lens'20127,763,866'Charged particle beam device with aperture'20107,679,054'Double stage charged particle beam energy width reduction system for charged particle beam system'20107,576,917'Multi-axis lens, beam system making use of the compound lens, and method of manufacturing the compound lens'20097,507,956'Charged particle beam energy width reduction system for charged particle beam system'20097,468,517'Single stage charged particle beam energy width reduction system for charged particle beam system'20087,439,500'Analyzing system and charged particle beam device'20087,335,894'High current density particle beam system'20086,667,478'Particle beam apparatus'20036,627,890'Particle beam apparatus for tilted observation of a specimen'20036,407,387'Particle beam apparatus'20026,232,601'Dynamically compensated objective lens-detection device and method'20016,107,633'Electron beam lens'20006,104,034'Objective lens'20006,051,838'Optical unit'20005,895,919'Gun lens for generating a particle beam'19995,847,399'Deflection system'19985,422,486'Scanning electron beam device'19954,760,261'Alpha-type electron energy filter'19884,740,704'Omega-type electron energy filter'1988

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1988Based in Rossdorf, DE· patent location history
1995–2015Patents assigned to INTEGRATED CIRCUIT TESTING (17)· patent assignee history
1995Based in Munich, DE· patent location history
1998–2021Based in Erding, DE· patent location history
1999–2003Patents assigned to ADVANTEST CORP (7)· patent assignee history
2012–2015Patents assigned to LANIO STEFAN (8)· patent assignee history
2016–2017Patents assigned to ICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH (5)· patent assignee history
2018–2021Patents assigned to ICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH (6)· patent assignee history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
INTEGRATED CIRCUIT TESTING171995–2015
LANIO STEFANself82012–2015
ADVANTEST CORP71999–2003
ICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH62018–2021
ICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH52016–2017
Locations
LocationPatentsSpan
Erding, DE381998–2021
Rossdorf, DE21988
Munich, DE11995