Inventor
YASUO AOKI
Inventor
JP
Overview
Patents· 4 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices29%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1029%
H01LSemiconductor devices21%
G01BMeasuring length, thickness or similar linear dimensions14%
G01DMeasuring not specially adapted for a specific variable7%
PatentTitleYear
11,774,864Carrier device, exposure apparatus, exposure method, manufacturing method of flat-panel display, device manufacturing method, and carrying method202311,520,242Exposure apparatus, manufacturing method of flat-panel display, device manufacturing method, and exposure method202211,402,762Movable body apparatus, moving method, exposure apparatus, exposure method, flat-panel display manufacturing method, and device manufacturing method202211,187,999Movable body apparatus, moving method, exposure apparatus, exposure method, flat-panel display manufacturing method, and device manufacturing method2021Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2021–2023Patents assigned to NIKON CORP (4)· patent assignee history
2021–2023Based in JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| NIKON CORP | 4 | 2021–2023 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 4 | 2021–2023 |