Inventor
Hironobu Matsui
Inventor
An Yang, KR
Overview
Patents· 4 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps57%
B82YSpecific uses or applications of nanostructures29%
G01QScanning-probe techniques or apparatus14%
PatentTitleYear
5,442,183'Charged particle beam apparatus including means for maintaining a vacuum seal'19955,254,856'Charged particle beam apparatus having particular electrostatic objective lens and vacuum pump systems'19935,229,607'Combination apparatus having a scanning electron microscope therein'19935,187,371'Charged particle beam apparatus'1993Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1993–1995Patents assigned to HITACHI LTD (4)· patent assignee history
1993–1995Based in An Yang, KR· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| HITACHI LTD | 4 | 1993–1995 |
Locations
| Location | Patents | Span |
|---|---|---|
| An Yang, KR | 4 | 1993–1995 |