Inventor
Wolfgang Hoegele
Inventor
Aalen, DE
Overview
Patents· 7 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices33%
G02BOptical elements, systems or apparatus20%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1020%
G01BMeasuring length, thickness or similar linear dimensions13%
G01CMeasuring distances, levels or bearings7%
G06TImage data processing or generation, in general7%
PatentTitleYear
10,852,126Method and arrangement for optically capturing an object with a light pattern projection202010,605,592Method and arrangement for capturing coordinates of an object surface by triangulation202010,394,128Method for predicting at least one illumination parameter for evaluating an illumination setting201910,078,267Method for predicting at least one illumination parameter for evaluating an illumination setting20189,910,359'Illumination system of a microlithographic projection exposure apparatus'20189,500,954'Illumination system of a microlithographic projection exposure apparatus'20169,310,690'Illumination system of a microlithographic projection exposure apparatus'2016Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2016–2019Patents assigned to ZEISS CARL SMT GMBH (5)· patent assignee history
2016–2018Based in Aalen, DE· patent location history
2018–2019Based in Schwaebisch Gmuend, DE· patent location history
2020Patents assigned to ZEISS CARL INDUSTRIELLE MESSTECHNIK GMBH (2)· patent assignee history
2020Based in Rosenheim, DE· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ZEISS CARL SMT GMBH | 5 | 2016–2019 |
| ZEISS CARL INDUSTRIELLE MESSTECHNIK GMBH | 2 | 2020 |
Locations
| Location | Patents | Span |
|---|---|---|
| Aalen, DE | 3 | 2016–2018 |
| Rosenheim, DE | 2 | 2020 |
| Schwaebisch Gmuend, DE | 2 | 2018–2019 |