Inventor
Gousuke Shiraishi
Inventor
Koshi, JP
Overview
Patents· 9 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices33%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1033%
H01LSemiconductor devices19%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1010%
G03BApparatus or arrangements for taking photographs or for projecting or viewing them5%
PatentTitleYear
10,527,948Optical processing apparatus, coating/development apparatus, optical processing method, and non-transitory computer-readable storage medium202010,459,339Resist pattern forming method, coating and developing apparatus and storage medium201910,274,843Exposure apparatus, exposure method and storage medium201910,101,669Exposure apparatus, resist pattern forming method, and storage medium201810,025,190Substrate treatment system20189,899,243'Light irradiation apparatus'20188,614,140'Semiconductor device manufacturing apparatus'20138,343,714'Resist applying and developing method, resist film processing unit, and resist applying and developing apparatus comprising the unit'20138,101,507'Semiconductor device manufacturing method and semiconductor device manufacturing apparatus'2012Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2012–2020Patents assigned to TOKYO ELECTRON LTD (9)· patent assignee history
2012–2013Patents assigned to SHIRAISHI GOUSUKE (3)· patent assignee history
2012–2013Patents assigned to ASAKO RYUICHI (2)· patent assignee history
2012–2013Patents assigned to TAHARA SHIGERU (2)· patent assignee history
2012–2013Based in Tokyo, JP· patent location history
2013Patents assigned to INATOMI YUICHIRO (1)· patent assignee history
2018–2020Based in Koshi, JP· patent location history
2018Based in Kumamoto, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 9 | 2012–2020 |
| SHIRAISHI GOUSUKEself | 3 | 2012–2013 |
| ASAKO RYUICHI | 2 | 2012–2013 |
| TAHARA SHIGERU | 2 | 2012–2013 |
| INATOMI YUICHIRO | 1 | 2013 |
Locations
| Location | Patents | Span |
|---|---|---|
| Koshi, JP | 5 | 2018–2020 |
| Tokyo, JP | 3 | 2012–2013 |
| Kumamoto, JP | 1 | 2018 |