Inventor
Jeffrey E. Krampert
Inventor
Topsfield, MA, US
Overview
Patents· 14 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1030%
H01JElectric discharge tubes or discharge lamps15%
C23CCoating metallic material11%
H01LSemiconductor devices11%
B05DProcesses for applying fluent materials to surfaces, in general7%
G01KMeasuring temperature7%
F16BDevices for fastening or securing constructional elements or machine parts together, e.g. nails, bolts, circlips, clamps, clips or wedges4%
G01JMeasurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light4%
H05HPlasma technique4%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests4%
PatentTitleYear
10,974,276Hydrophobic shafts for use in process chambers202110,925,146Ion source chamber with embedded heater202110,569,299Hydrophobic shafts for use in process chambers20209,865,433'Gas injection system for ion beam device'20189,520,264'Method and apparatus for clamping and cooling a substrate for ion implantation'20169,417,138'Gas coupled probe for substrate temperature measurement'20169,218,990'Method and apparatus for holding a plurality of substrates for processing'20159,212,949'Technique for temperature measurement and calibration of semiconductor workpieces using infrared'20159,175,710'Contained ceramic fastener'20159,070,730'Method and apparatus for removing a vertically-oriented substrate from a cassette'20158,585,115'Method and apparatus for lifting a horizontally-oriented substrate from a cassette'20138,550,520'Method and apparatus for manipulating a substrate'20138,328,494'In vacuum optical wafer heater for cryogenic processing'20127,977,652'Optical heater for cryogenic ion implanter surface regeneration'2011Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2011–2015Patents assigned to VARIAN SEMICONDUCTOR EQUIPMENT (8)· patent assignee history
2011–2021Based in Topsfield, MA, US· patent location history
2012–2016Patents assigned to KRAMPERT JEFFREY E (6)· patent assignee history
2013–2016Patents assigned to FAIRHURST JOHN ROBERT (5)· patent assignee history
2013–2016Patents assigned to HERTEL RICHARD J (5)· patent assignee history
2016–2021Patents assigned to VARIAN SEMICONDUCTOR EQUIPMENT ASS INC (5)· patent assignee history
2021Based in Gloucester, MA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| VARIAN SEMICONDUCTOR EQUIPMENT | 8 | 2011–2015 |
| KRAMPERT JEFFREY Eself | 6 | 2012–2016 |
| FAIRHURST JOHN ROBERT | 5 | 2013–2016 |
| HERTEL RICHARD J | 5 | 2013–2016 |
| VARIAN SEMICONDUCTOR EQUIPMENT ASS INC | 5 | 2016–2021 |
Locations
| Location | Patents | Span |
|---|---|---|
| Topsfield, Massachusetts, US | 13 | 2011–2021 |
| Gloucester, Massachusetts, US | 1 | 2021 |