Inventor
YUEH-LIN YANG
Inventor
TW
Overview
Patents· 22 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Lprimary
H01LSemiconductor devices17%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices16%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1016%
B08BCleaning in general6%
C23CCoating metallic material6%
G02FOptical devices or arrangements for the control of light by modification of the optical properties of the media of the elements involved therein4%
H10DInorganic electric semiconductor devices4%
B81BMicrostructural devices or systems, e.g. micromechanical devices3%
G01CMeasuring distances, levels or bearings3%
G01PMeasuring linear or angular speed, acceleration, deceleration, or shock3%
PatentTitleYear
12,368,066System and method for correcting non-ideal wafer topography202512,347,716Method for cleaning electrostatic chuck202512,222,611Variable pitch fan-out routing for display panels having narrow borders202512,170,218Method for cleaning electrostatic chuck202412,066,756Method for lithography process202412,027,407Substrate support apparatus and method202411,914,302Method and apparatus for controlling droplet in extreme ultraviolet light source202411,899,377System and method for thermal management of reticle in semiconductor manufacturing202411,809,084Radiation source supply system for lithographic tools202311,676,974Distributed and multi-group pad arrangement202311,592,715Pad arrangement in fan-out areas of display devices202311,508,602Cleaning tool202211,448,955Mask for lithography process and method for manufacturing the same202211,435,669Radiation source supply system for lithographic tools202211,398,693Card edge connector202211,367,644System and method for correcting non-ideal wafer topography202211,287,751System and method for lens heating control2022D0945372Electrical connector202211,256,181Apparatus and method for removing particles in semiconductor manufacturing202211,243,478System and method for thermal management of reticle in semiconductor manufacturing202211,237,483Method and apparatus for controlling droplet in extreme ultraviolet light source202211,221,563Lens control for lithography tools2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2025Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (17)· patent assignee history
2022Patents assigned to CHIEF LAND ELECTRONIC CO LTD (2)· patent assignee history
2022Patents assigned to STARCONN ELECTRONIC SU ZHOU CO LTD (1)· patent assignee history
2022–2025Based in TW· patent location history
2023–2025Patents assigned to PARADE TECH LTD (3)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TAIWAN SEMICONDUCTOR MFG CO LTD | 17 | 2022–2025 |
| PARADE TECH LTD | 3 | 2023–2025 |
| CHIEF LAND ELECTRONIC CO LTD | 2 | 2022 |
| STARCONN ELECTRONIC SU ZHOU CO LTD | 1 | 2022 |
Locations
| Location | Patents | Span |
|---|---|---|
| TW | 22 | 2022–2025 |