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Inventor

FUYUKI OGAKI

Inventor
JP

Overview

1→
Patents
2023
Patent span
Electricity
Primary field (CPC H)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

B08Bprimary
B08BCleaning in general33%
H01LSemiconductor devices33%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1033%
PatentTitleYear
11,664,252Cleaning device, polishing device, and device and method for calculating rotation speed of substrate in cleaning device2023

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2023Patents assigned to EBARA CORP (1)· patent assignee history
2023Based in JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
EBARA CORP12023
Locations
LocationPatentsSpan
JP12023