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Inventor

Hideyuki Yamamato

Inventor
Kudamatsu, JP

Overview

1→
Patents
2003
Patent span
Physics
Primary field (CPC G)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G05Bprimary
G05BControl or regulating systems in general33%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1033%
Y02PClimate change mitigation technologies in the production or processing of goods33%
PatentTitleYear
6,616,759'Method of monitoring and/or controlling a semiconductor manufacturing apparatus and a system therefor'2003

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2003Patents assigned to HITACHI LTD (1)· patent assignee history
2003Based in Kudamatsu, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
HITACHI LTD12003
Locations
LocationPatentsSpan
Kudamatsu, JP12003