Inventor
Hari Pathangi
Inventor
Chennai, IN
Overview
Patents· 3 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G01Bprimary
G01BMeasuring length, thickness or similar linear dimensions15%
G01NInvestigating or analysing materials by determining their chemical or physical properties15%
H01JElectric discharge tubes or discharge lamps15%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1015%
G01RMeasuring electric variables8%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices8%
G06NComputing arrangements based on specific computational models8%
G06TImage data processing or generation, in general8%
H01LSemiconductor devices8%
PatentTitleYear
11,035,666Inspection-guided critical site selection for critical dimension measurement202110,672,588Using deep learning based defect detection and classification schemes for pixel level image quantification202010,473,460Overlay measurements of overlapping target structures based on symmetry of scanning electron beam signals2019Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2019–2021Patents assigned to KLA TENCOR CORP (3)· patent assignee history
2019–2021Based in Chennai, IN· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| KLA TENCOR CORP | 3 | 2019–2021 |
Locations
| Location | Patents | Span |
|---|---|---|
| Chennai, IN | 3 | 2019–2021 |