Inventor
Martin Plihal
Inventor
Pleasanton, CA, US
Overview
Patents· 34 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G01Nprimary
G01NInvestigating or analysing materials by determining their chemical or physical properties21%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1018%
G06TImage data processing or generation, in general16%
H01LSemiconductor devices7%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices6%
G01RMeasuring electric variables5%
G06FElectric digital data processing5%
G06VImage or video recognition or understanding5%
G05BControl or regulating systems in general4%
G06KGraphical data reading4%
PatentTitleYear
11,119,060Defect location accuracy using shape based grouping guided defect centering202111,114,324Defect candidate generation for inspection202111,055,840Semiconductor hot-spot and process-window discovery combining optical and electron-beam inspection202110,964,013System, method for training and applying defect classifiers in wafers having deeply stacked layers202110,902,579Creating and tuning a classifier to capture more defects of interest during inspection202110,832,396And noise based care areas202010,699,926Identifying nuisances and defects of interest in defects detected on a wafer202010,692,690Care areas for improved electron beam defect detection202010,670,536Mode selection for inspection202010,436,720Adaptive automatic defect classification201910,338,004Production sample shaping that preserves re-normalizability201910,267,748Optimizing training sets used for setting up inspection-related algorithms20199,984,454System, method and computer program product for correcting a difference image generated from a comparison of target and reference dies20189,983,148System and method for production line monitoring20189,940,705System, method and computer program product for detecting defects in a fabricated target component using consistent modulation for the target and reference components20189,891,538'Adaptive sampling for process window determination'20189,835,566Adaptive nuisance filter20179,714,905'Wafer inspection recipe setup'20179,613,411'Creating defect classifiers and nuisance filters'20179,582,869'Dynamic binning for diversification and defect discovery'20179,518,934'Wafer defect discovery'20169,430,743'Composite defect classifier'20168,948,494'Unbiased wafer defect samples'20158,594,823'Scanner performance comparison and matching using design and defect data'20138,537,349'Monitoring of time-varying defect classification performance'20138,289,510'Process excursion detection'20128,165,837'Multi-scale classification of defects'20127,646,476'Process excursion detection'20107,570,797'Methods and systems for generating an inspection process for an inspection system'20097,417,724'Wafer inspection systems and methods for analyzing inspection data'20087,394,534'Process excursion detection'20087,227,628'Wafer inspection systems and methods for analyzing inspection data'20077,006,886'Detection of spatially repeating signatures'20066,718,526'Spatial signature analysis'2004Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2004–2021Patents assigned to KLA TENCOR CORP (28)· patent assignee history
2004–2021Based in Pleasanton, CA, US· patent location history
2006–2009Patents assigned to KLA TENCOR TECH CORP (4)· patent assignee history
2012–2013Patents assigned to PLIHAL MARTIN (4)· patent assignee history
2012Patents assigned to HUET PATRICK Y (2)· patent assignee history
2021Patents assigned to KLA CORP (2)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| KLA TENCOR CORP | 28 | 2004–2021 |
| KLA TENCOR TECH CORP | 4 | 2006–2009 |
| PLIHAL MARTINself | 4 | 2012–2013 |
| HUET PATRICK Y | 2 | 2012 |
| KLA CORP | 2 | 2021 |
Locations
| Location | Patents | Span |
|---|---|---|
| Pleasanton, California, US | 34 | 2004–2021 |