LexDanaLexDanabeta
Inventor

Robert J. Stoya

Inventor
Cave Creek, AZ, US

Overview

3→
Patents
2005–2007
Patent span
Performing operations
Primary field (CPC B)

Patents· 3 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

B24Bprimary
B24BMachines, devices, or processes for grinding or polishing75%
G01BMeasuring length, thickness or similar linear dimensions25%
PatentTitleYear
7,198,545'Method of calibration and data evaluation for eddy current metrology systems'20077,189,140'Methods using eddy current for calibrating a CMP tool'20076,953,382'Methods and apparatuses for conditioning polishing surfaces utilized during CMP processing'2005

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2005–2007Patents assigned to NOVELLUS SYSTEMS INC (3)· patent assignee history
2005–2007Based in Cave Creek, AZ, US· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
NOVELLUS SYSTEMS INC32005–2007
Locations
LocationPatentsSpan
Cave Creek, AZ, US32005–2007