Inventor
AKHIL SINGHAL
Inventor
US
Overview
Patents· 11 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1027%
H01LSemiconductor devices22%
C23CCoating metallic material10%
H01JElectric discharge tubes or discharge lamps10%
H10DInorganic electric semiconductor devices7%
C25DProcesses for the electrolytic or electrophoretic production of coatings5%
H02NElectric machines not otherwise provided for5%
H10BElectronic memory devices5%
G01BMeasuring length, thickness or similar linear dimensions2%
G01NInvestigating or analysing materials by determining their chemical or physical properties2%
PatentTitleYear
12,532,675Core removal202612,381,106Systems and methods of seasoning electrostatic chucks with dielectric seasoning films202512,371,781In situ protective coating of chamber components for semiconductor processing202512,372,872Extreme ultraviolet (EUV) lithography using an intervening layer or a multi-layer stack with varying mean free paths for secondary electron generation202512,315,724Helium-free silicon formation202512,211,908Profile shaping for control gate recesses202511,915,923Method to clean SnO202411,887,846Deposition tool and method for depositing metal oxide films on organic materials202411,784,229Profile shaping for control gate recesses202311,670,516Metal-containing passivation for high aspect ratio etch202311,646,216Systems and methods of seasoning electrostatic chucks with dielectric seasoning films2023Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2023–2026Patents assigned to LAM RES CORP (6)· patent assignee history
2023–2025Patents assigned to APPLIED MATERIALS INC (5)· patent assignee history
2023–2026Based in US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| LAM RES CORP | 6 | 2023–2026 |
| APPLIED MATERIALS INC | 5 | 2023–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 11 | 2023–2026 |