Inventor
Ryo Nawata
Inventor
Utsunomiya, JP
Overview
Patents· 12 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices44%
G02BOptical elements, systems or apparatus15%
G05DSystems for controlling or regulating non-electric variables11%
F16FSprings7%
G01BMeasuring length, thickness or similar linear dimensions4%
G03BApparatus or arrangements for taking photographs or for projecting or viewing them4%
G05BControl or regulating systems in general4%
H01JElectric discharge tubes or discharge lamps4%
H02PControl or regulation of electric motors, electric generators or dynamo-electric converters4%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h104%
PatentTitleYear
10,209,633Vibration control apparatus, lithography apparatus, and method of manufacturing article20199,671,704'Vibration reduction apparatus, lithography apparatus and method of manufacturing article'20179,665,108'Vibration reduction apparatus, lithography apparatus, and method of manufacturing article'20179,599,185'Vibration control apparatus, lithography apparatus, and article manufacturing method'20179,052,614'Vibration control apparatus, lithography apparatus, and method of manufacturing article'20157,948,695'Optical element positioning apparatus, projection optical system and exposure apparatus'20117,821,726'Optical element positioning apparatus, projection optical system and exposure apparatus'20107,733,462'Exposure apparatus and exposure method'20107,643,150'Optical apparatus, exposure apparatus, and device manufacturing method'20107,589,911'Technique for positioning optical system element'20097,221,463'Positioning apparatus, exposure apparatus, and method for producing device'20077,133,115'Positioning device, exposure apparatus using the positioning device, and device production method'2006Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2006–2019Patents assigned to CANON KK (12)· patent assignee history
2006–2009Based in Tochigi, JP· patent location history
2010–2019Based in Utsunomiya, JP· patent location history
2015Patents assigned to ASADA KATSUMI (1)· patent assignee history
2015Patents assigned to NAWATA RYO (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| CANON KK | 12 | 2006–2019 |
| ASADA KATSUMI | 1 | 2015 |
| NAWATA RYOself | 1 | 2015 |
Locations
| Location | Patents | Span |
|---|---|---|
| Utsunomiya, JP | 9 | 2010–2019 |
| Tochigi, JP | 3 | 2006–2009 |