Inventor
Nancy Fung
Inventor
Livermore, CA, US
Overview
Patents· 8 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1032%
H01LSemiconductor devices16%
H01JElectric discharge tubes or discharge lamps12%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1012%
C23CCoating metallic material8%
B05BSpraying apparatus4%
C01BNon-metallic elements4%
C09KMaterials for miscellaneous applications, not provided for elsewhere4%
C22CAlloys4%
H10BElectronic memory devices4%
PatentTitleYear
10,954,129Diamond-like carbon as mandrel202110,910,381Multicolor approach to DRAM STI active cut patterning202110,867,795Method of etching hardmasks containing high hardness materials202010,283,370Silicon addition for silicon nitride etching selectivity20198,748,322'Silicon oxide recess etch'20148,329,593'Method and apparatus for removing polymer from the wafer backside and edge'20127,879,183'Apparatus and method for front side protection during backside cleaning'20117,628,863'Heated gas box for PECVD applications'2009Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2009–2021Patents assigned to APPLIED MATERIALS INC (8)· patent assignee history
2009–2012Based in Sunnyvale, CA, US· patent location history
2011–2021Based in Livermore, CA, US· patent location history
2012Patents assigned to BALAKRISHNA AJIT (1)· patent assignee history
2012Patents assigned to FUNG NANCY (1)· patent assignee history
2012Patents assigned to MERRY WALTER R (1)· patent assignee history
2012Patents assigned to RAUF SHAHID (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 8 | 2009–2021 |
| BALAKRISHNA AJIT | 1 | 2012 |
| FUNG NANCYself | 1 | 2012 |
| MERRY WALTER R | 1 | 2012 |
| RAUF SHAHID | 1 | 2012 |
Locations
| Location | Patents | Span |
|---|---|---|
| Livermore, California, US | 6 | 2011–2021 |
| Sunnyvale, California, US | 2 | 2009–2012 |