Inventor
KUN TACK LEE
Inventor
KR
Overview
Patents· 14 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Lprimary
H01LSemiconductor devices28%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1028%
B08BCleaning in general17%
B23KSoldering or unsoldering11%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices7%
B24BMachines, devices, or processes for grinding or polishing2%
F26BDrying solid materials or objects by removing liquid therefrom2%
H10BElectronic memory devices2%
H10DInorganic electric semiconductor devices2%
PatentTitleYear
12,588,452Substrate processing apparatus and method thereof202612,408,323Semiconductor memory device and method for manufacturing the same202512,322,587Substrate drying apparatus and semiconductor device manufacturing method using same202512,165,866Wafer cleaning apparatus and wafer cleaning method using the same202412,042,828Wafer cleaning apparatus and wafer cleaning method using the same202411,986,921Chemical mechanical polishing apparatus, chemical mechanical polishing method and method for fabricating semiconductor device202411,923,216Apparatus and method for treating substrate including process chambers and transfer chamber202411,887,868Substrate processing apparatus and apparatus for manufacturing integrated circuit device202411,862,457Wafer cleaning apparatus, method for cleaning wafer and method for fabricating semiconductor device202411,721,565Multi-chamber apparatus202311,648,594Wafer cleaning apparatus and wafer cleaning method using the same202311,605,545Wafer cleaning equipment202311,581,182Wafer cleaning apparatus, method for cleaning wafer and method for fabricating semiconductor device202311,227,761Method of removing chemicals from a substrate2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2026Patents assigned to SAMSUNG ELECTRONICS CO LTD (14)· patent assignee history
2022–2026Based in KR· patent location history
2024–2026Patents assigned to SEMES CO LTD (2)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| SAMSUNG ELECTRONICS CO LTD | 14 | 2022–2026 |
| SEMES CO LTD | 2 | 2024–2026 |
Locations
| Location | Patents | Span |
|---|---|---|
| KR | 14 | 2022–2026 |