Inventor
Hidetoshi Hanaoka
Inventor
Nirasaki, JP
Overview
Patents· 17 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps39%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1027%
H01LSemiconductor devices12%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests12%
C23CCoating metallic material2%
H04LTransmission of digital information, e.g. telegraphic communication2%
H04QSelecting2%
H05HPlasma technique2%
PatentTitleYear
10,854,431Plasma processing apparatus and method202010,847,348Plasma processing apparatus and plasma processing method202010,580,622Plasma processing apparatus202010,546,727Plasma processing apparatus and method202010,529,539Plasma processing apparatus and method20209,966,233Plasma processing apparatus20189,490,105'Plasma processing apparatus and method'20169,330,891'Plasma processing method and plasma processing apparatus'20169,251,998'Plasma processing apparatus'20168,999,068'Chamber cleaning method'20158,603,293'Plasma processing apparatus and method'20138,513,563'Plasma processing apparatus and plasma processing method'20138,138,445'Plasma processing apparatus and plasma processing method'20128,034,213'Plasma processing apparatus and plasma processing method'20117,988,816'Plasma processing apparatus and method'20117,951,262'Plasma processing apparatus and method'20115,583,858'Asynchronous transfer mode switching device'1996Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1996Based in Kawasaki, JP· patent location history
2011–2020Patents assigned to TOKYO ELECTRON LTD (16)· patent assignee history
2011–2020Based in Nirasaki, JP· patent location history
2012–2016Patents assigned to HANAOKA HIDETOSHI (5)· patent assignee history
2012–2015Patents assigned to IWATA MANABU (4)· patent assignee history
2012–2013Patents assigned to KOSHIMIZU CHISHIO (3)· patent assignee history
2012–2013Patents assigned to MATSUMOTO NAOKI (3)· patent assignee history
2015Based in Yamanashi, JP· patent location history
2016–2020Based in Miyagi, JP· patent location history
2016Based in Kurokawa-gun, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 16 | 2011–2020 |
| HANAOKA HIDETOSHIself | 5 | 2012–2016 |
| IWATA MANABU | 4 | 2012–2015 |
| KOSHIMIZU CHISHIO | 3 | 2012–2013 |
| MATSUMOTO NAOKI | 3 | 2012–2013 |
Locations
| Location | Patents | Span |
|---|---|---|
| Nirasaki, JP | 10 | 2011–2020 |
| Miyagi, JP | 4 | 2016–2020 |
| Kurokawa-gun, JP | 1 | 2016 |
| Yamanashi, JP | 1 | 2015 |
| Kawasaki, JP | 1 | 1996 |