Inventor
Yosuke Shirata
Inventor
Saitama, JP
Overview
Patents· 7 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices64%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1018%
G01BMeasuring length, thickness or similar linear dimensions9%
G03BApparatus or arrangements for taking photographs or for projecting or viewing them9%
PatentTitleYear
9,025,126'Exposure apparatus adjusting method, exposure apparatus, and device fabricating method'20158,654,306'Exposure apparatus, cleaning method, and device fabricating method'20148,547,520'Exposing method, exposure apparatus, and device fabricating method'20138,243,254'Exposing method, exposure apparatus, and device fabricating method'20127,876,452'Interferometric position-measuring devices and methods'20116,882,403'Lithography system and method'20056,002,487'Alignment method for performing alignment between shot areas on a wafer'1999Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1999–2015Patents assigned to NIKON CORP (7)· patent assignee history
1999–2005Based in Tokyo, JP· patent location history
2011–2015Based in Saitama, JP· patent location history
2012–2015Patents assigned to SHIRATA YOSUKE (4)· patent assignee history
2014Patents assigned to OKUMURA MASAHIKO (1)· patent assignee history
2014Patents assigned to SHIRAISHI KENICHI (1)· patent assignee history
2015Patents assigned to KIDA YOSHIKI (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| NIKON CORP | 7 | 1999–2015 |
| SHIRATA YOSUKEself | 4 | 2012–2015 |
| KIDA YOSHIKI | 1 | 2015 |
| OKUMURA MASAHIKO | 1 | 2014 |
| SHIRAISHI KENICHI | 1 | 2014 |
Locations
| Location | Patents | Span |
|---|---|---|
| Saitama, JP | 5 | 2011–2015 |
| Tokyo, JP | 2 | 1999–2005 |