Inventor
Mark Joseph Saly
Inventor
US
Overview
Patents· 13 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1024%
H01LSemiconductor devices20%
C23CCoating metallic material16%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices16%
B05DProcesses for applying fluent materials to surfaces, in general6%
C23FNon-mechanical removal of metallic material from surface6%
H01JElectric discharge tubes or discharge lamps4%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h104%
G01NInvestigating or analysing materials by determining their chemical or physical properties2%
G05BControl or regulating systems in general2%
PatentTitleYear
12,575,392Method to deposit metal cap for interconnect202612,559,840Apparatus and methods for self-assembled monolayer (SAM) deposition in semiconductor equipment202612,334,394Methods and apparatus for selective etch stop capping and selective via open for fully landed via on underlying metal202512,300,491Deposition of semiconductor integration films202512,282,256Photoresist deposition using independent multichannel showerhead202512,084,764Vapor phase photoresists deposition202412,068,170Vapor phase thermal etch solutions for metal oxo photoresists202412,033,866Vapor phase thermal etch solutions for metal oxo photoresists202411,886,120Deposition of semiconductor integration films202411,621,172Vapor phase thermal etch solutions for metal oxo photoresists202311,581,206Capacitive sensor for chamber condition monitoring202311,562,904Deposition of semiconductor integration films202311,217,443Sequential deposition and high frequency plasma treatment of deposited film on patterned and un-patterned substrates2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2026Patents assigned to APPLIED MATERIALS INC (13)· patent assignee history
2022–2026Based in US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 13 | 2022–2026 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 13 | 2022–2026 |