Inventor
MICHAEL D. WILLWERTH
Inventor
US
Overview
Patents· 15 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps28%
G01NInvestigating or analysing materials by determining their chemical or physical properties20%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1020%
H01LSemiconductor devices15%
G01JMeasurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light5%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices5%
G05BControl or regulating systems in general3%
H03KPulse technique3%
H10NElectric solid-state devices not otherwise provided for3%
PatentTitleYear
12,537,179Capacitive sensing data integration for plasma chamber condition monitoring202612,437,979Capacitive sensors and capacitive sensing locations for plasma chamber condition monitoring202512,405,164Spatial optical emission spectroscopy for etch uniformity202512,163,911Capacitive sensor housing for chamber condition monitoring202412,130,561Gas distribution plate with UV blocker202412,068,135Fast gas exchange apparatus, system, and method202412,009,236Sensors and system for in-situ edge ring erosion monitor202411,668,602Spatial optical emission spectroscopy for etch uniformity202311,581,206Capacitive sensor for chamber condition monitoring202311,551,905Resonant process monitor202311,545,346Capacitive sensing data integration for plasma chamber condition monitoring202311,448,977Gas distribution plate with UV blocker at the center202211,415,538Capacitive sensor housing for chamber condition monitoring202211,387,135Conductive wafer lift pin o-ring gripper with resistor202211,264,252Chamber lid with integrated heater2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2026Patents assigned to APPLIED MATERIALS INC (15)· patent assignee history
2022–2026Based in US· patent location history
2023Patents assigned to INTEL CORP (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 15 | 2022–2026 |
| INTEL CORP | 1 | 2023 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 15 | 2022–2026 |