Inventor
A. Stuart Denholm
Inventor
Lincoln, MA, US
Overview
Patents· 9 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps47%
C23CCoating metallic material26%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1021%
H05HPlasma technique5%
PatentTitleYear
6,458,430'Pretreatment process for plasma immersion ion implantation'20026,237,527'System for improving energy purity and implant consistency, and for minimizing charge accumulation of an implanted substrate'20016,180,954'Dual-walled exhaust tubing for vacuum pump'20016,101,971'Ion implantation control using charge collection, optical emission spectroscopy and mass analysis'20006,050,218'Dosimetry cup charge collection in plasma immersion ion implantation'20005,911,832'Plasma immersion implantation with pulsed anode'19995,654,043'Pulsed plate plasma implantation system and method'19975,134,299'Ion beam implantation method and apparatus for particulate control'19924,667,111'Accelerator for ion implantation'1987Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1987–2001Patents assigned to EATON CORP (6)· patent assignee history
1987Based in Prides Crossing, MA, US· patent location history
1992–2002Based in Lincoln, MA, US· patent location history
2000–2002Patents assigned to AXCELIS TECH INC (3)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| EATON CORP | 6 | 1987–2001 |
| AXCELIS TECH INC | 3 | 2000–2002 |
Locations
| Location | Patents | Span |
|---|---|---|
| Lincoln, Massachusetts, US | 8 | 1992–2002 |
| Prides Crossing, Massachusetts, US | 1 | 1987 |