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Inventor

Kelvin Zin

Inventor
Albany, NY, US

Overview

5→
Patents
2009–2014
Patent span
Electricity
Primary field (CPC H)

Patents· 5 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1042%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1033%
H01JElectric discharge tubes or discharge lamps8%
H01LSemiconductor devices8%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests8%
PatentTitleYear
8,809,196'Method of etching a thin film using pressure modulation'20148,435,901'Method of selectively etching an insulation stack for a metal interconnect'20138,252,192'Method of pattern etching a dielectric film while removing a mask layer'20127,637,269'Low damage method for ashing a substrate using CO2/CO-based process'20097,622,390'Method for treating a dielectric film to reduce damage'2009

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2009–2014Patents assigned to TOKYO ELECTRON LTD (5)· patent assignee history
2009–2014Based in Albany, NY, US· patent location history
2009Based in Peabody, MA, US· patent location history
2012–2013Patents assigned to ZIN KELVIN (2)· patent assignee history
2012Patents assigned to BALASUBRAMANIAM VAIDYANATHAN (1)· patent assignee history
2012Patents assigned to LEE YAO-SHENG (1)· patent assignee history
2012Patents assigned to NISHINO MASARU (1)· patent assignee history
2013Based in Singapore, SG· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD52009–2014
ZIN KELVINself22012–2013
BALASUBRAMANIAM VAIDYANATHAN12012
LEE YAO-SHENG12012
NISHINO MASARU12012
Locations
LocationPatentsSpan
Albany, New York, US32009–2014
Singapore, SG12013
Peabody, Massachusetts, US12009