Inventor
Ulrich Pohlmann
Inventor
Jena, DE
Overview
Patents· 4 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices27%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1027%
G01BMeasuring length, thickness or similar linear dimensions18%
B25JManipulators9%
G01NInvestigating or analysing materials by determining their chemical or physical properties9%
H01JElectric discharge tubes or discharge lamps9%
PatentTitleYear
10,474,040Systems and methods for device-correlated overlay metrology201910,473,460Overlay measurements of overlapping target structures based on symmetry of scanning electron beam signals20199,851,643Apparatus and methods for reticle handling in an EUV reticle inspection tool20178,125,653'Apparatus and method for the determination of the position of a disk-shaped object'2012Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2012Patents assigned to POHLMANN ULRICH (1)· patent assignee history
2012Patents assigned to RENNICKE FRANK (1)· patent assignee history
2012Patents assigned to VISTEC SEMICONDUCTOR SYS JENA (1)· patent assignee history
2012Patents assigned to WENIGER GERT (1)· patent assignee history
2012–2019Based in Jena, DE· patent location history
2017–2019Patents assigned to KLA TENCOR CORP (3)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| KLA TENCOR CORP | 3 | 2017–2019 |
| POHLMANN ULRICHself | 1 | 2012 |
| RENNICKE FRANK | 1 | 2012 |
| VISTEC SEMICONDUCTOR SYS JENA | 1 | 2012 |
| WENIGER GERT | 1 | 2012 |
Locations
| Location | Patents | Span |
|---|---|---|
| Jena, DE | 4 | 2012–2019 |