Inventor
Klaus Becker
Inventor
Kensington, NH, US
Overview
Patents· 29 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps17%
C03BManufacture, shaping, or supplementary processes11%
C03CChemical composition of glasses, glazes or vitreous enamels9%
G02BOptical elements, systems or apparatus9%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices8%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h106%
G01NInvestigating or analysing materials by determining their chemical or physical properties3%
H05HPlasma technique3%
B22FWorking metallic powder2%
B23CMilling2%
PatentTitleYear
10,807,901Method for producing an optical blank from synthetic quartz glass202010,732,519Mirror blank for EUV lithography without expansion under EUV radiation202010,692,697Apparatus and techniques for decelerated ion beam with no energy contamination202010,600,611Ion source crucible for solid feed materials202010,569,354Method for assembling textile adhesive tapes202010,290,461Ion source for enhanced ionization201910,147,584Apparatus and techniques for decelerated ion beam with no energy contamination201810,024,577Solar radiation receiver having an entry window made of quartz glass and method for producing an entry window201810,016,872Method for producing a mirror substrate blank of titanium-doped silica glass for EUV lithography, and system for determining the position of defects in a blank20189,818,570'Ion source for multiple charged species'20179,807,864'Electrode, accelerator column and ion implantation apparatus including same'20179,691,584'Ion source for enhanced ionization'20179,594,241'Transmitted-light microscope and method for transmitted-light microscopy'20179,586,850'Method for producing titanium-doped silica glass for use in EUV lithography and blank produced in accordance therewith'20179,568,818'Method for producing a blank of fluorine-doped and titanium-doped glass having a high silicic-acid content and a blank produced according to the method'20179,540,271'Blank made of titanium-doped silica glass and method for the production thereof'20179,522,840'Blank of TiO2-SiO2 glass for a mirror substrate for use in EUV lithography and method for the production thereof'20169,028,636'Method for manufacturing an adhesive tape, particularly suited for longitudinal wrapping of elongated goods'20158,766,209'Current limiter for high voltage power supply used with ion implantation system'20148,699,149'Reversing system for a sighting telescope'20148,482,852'Operating device for the focusing operation of a microscope'20138,227,772'Conductive contamination resistant insulator'20128,004,757'Safety system for a laser radiation device'20117,828,504'Combination load lock for handling workpieces'20107,714,406'Low-cost electrostatic clamp with fast de-clamp time'20107,105,840'Ion source for use in an ion implanter'20066,992,309'Ion beam measurement systems and methods for ion implant dose and uniformity control'20065,918,230'Method for operating a memory card'19994,358,069'Process and device for generating tape tension in a tape transport apparatus'1982Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2006–2010Patents assigned to AXCELIS TECH INC (4)· patent assignee history
2006–2020Based in Kensington, NH, US· patent location history
2011–2017Based in Breitenworbis, DE· patent location history
2012–2018Patents assigned to BECKER KLAUS (5)· patent assignee history
2015–2020Patents assigned to COROPLAST FRITZ MUELLER GMBH & CO KG (2)· patent assignee history
2015Based in Sprockhövel, DE· patent location history
2016–2020Patents assigned to HERAEUS QUARZGLAS (8)· patent assignee history
2016–2020Based in Hanau, DE· patent location history
2017–2020Patents assigned to VARIAN SEMICONDUCTOR EQUIPMENT ASS INC (6)· patent assignee history
2020Based in Sprockhovel, DE· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| HERAEUS QUARZGLAS | 8 | 2016–2020 |
| VARIAN SEMICONDUCTOR EQUIPMENT ASS INC | 6 | 2017–2020 |
| BECKER KLAUSself | 5 | 2012–2018 |
| AXCELIS TECH INC | 4 | 2006–2010 |
| COROPLAST FRITZ MUELLER GMBH & CO KG | 2 | 2015–2020 |
Locations
| Location | Patents | Span |
|---|---|---|
| Kensington, NH, US | 13 | 2006–2020 |
| Hanau, DE | 8 | 2016–2020 |
| Breitenworbis, DE | 3 | 2011–2017 |
| Sprockhovel, DE | 1 | 2020 |
| Sprockhövel, DE | 1 | 2015 |