Inventor
Ya-ming CHEN
Inventor
US
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Lprimary
H01LSemiconductor devices33%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1033%
H01JElectric discharge tubes or discharge lamps25%
H10BElectronic memory devices8%
PatentTitleYear
12,341,009Variable hardness amorphous carbon mask202512,300,468Method of uniformity control202512,217,935Plasma processing methods using multiphase multifrequency bias pulses202512,040,176Technologies for high aspect ratio carbon etching with inserted charge dissipation layer202412,009,211Method for highly anisotropic etching of titanium oxide spacer using selective top-deposition2024Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2024–2025Patents assigned to TOKYO ELECTRON LTD (5)· patent assignee history
2024–2025Based in US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 5 | 2024–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 5 | 2024–2025 |