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Inventor

Kunihiro Furuya

Inventor
Nirasaki, JP

Overview

10→
Patents
1998–2020
Patent span
Physics
Primary field (CPC G)

Patents· 10 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G01Rprimary
G01RMeasuring electric variables47%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1032%
H01LSemiconductor devices11%
G05DSystems for controlling or regulating non-electric variables5%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests5%
PatentTitleYear
10,753,972Wafer inspection system, wafer inspection apparatus and prober20209,863,977'Method of contacting substrate with probe card'20189,671,459'Maintenance carriage for wafer inspection apparatus and maintenance method for wafer inspection apparatus'20179,140,726'Support body for contact terminals and probe card'20158,310,257'Contact structure for inspection'20127,750,654'Probe method, prober, and electrode reducing/plasma-etching processing mechanism'20107,023,226'Probe pins zero-point detecting method, and prober'20066,239,602'Temperature managing apparatus for multi-stage container'20016,084,215'Semiconductor wafer holder with spring-mounted temperature measurement apparatus disposed therein'20005,708,222'Inspection apparatus, transportation apparatus, and temperature control apparatus'1998

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1998–2020Patents assigned to TOKYO ELECTRON LTD (10)· patent assignee history
1998–2020Based in Nirasaki, JP· patent location history
2010Patents assigned to OCTEC INC (1)· patent assignee history
2012Patents assigned to FURUYA KUNIHIRO (1)· patent assignee history
2012Patents assigned to MOCHIZUKI JUN (1)· patent assignee history
2015Based in Yamanashi, JP· patent location history
2017Patents assigned to NIPPO PREC CO LTD (1)· patent assignee history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD101998–2020
FURUYA KUNIHIROself12012
MOCHIZUKI JUN12012
NIPPO PREC CO LTD12017
OCTEC INC12010
Locations
LocationPatentsSpan
Nirasaki, JP91998–2020
Yamanashi, JP12015