Inventor
Mamoru Sueyoshi
Inventor
Tokyo, JP
Overview
Patents· 4 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1040%
C23CCoating metallic material30%
H01JElectric discharge tubes or discharge lamps20%
H01LSemiconductor devices10%
PatentTitleYear
10,032,626Method of manufacturing semiconductor device by forming a film on a substrate, substrate processing apparatus, and recording medium20187,033,937'Apparatus and method for use in manufacturing a semiconductor device'20066,576,063'Apparatus and method for use in manufacturing a semiconductor device'20036,217,663'Substrate processing apparatus and substrate processing method'2001Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2001Patents assigned to KOKUSAI ELECTRIC CO LTD (1)· patent assignee history
2001–2006Based in Tokyo, JP· patent location history
2003–2018Patents assigned to HITACHI INT ELECTRIC INC (3)· patent assignee history
2018Based in Toyama, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| HITACHI INT ELECTRIC INC | 3 | 2003–2018 |
| KOKUSAI ELECTRIC CO LTD | 1 | 2001 |
Locations
| Location | Patents | Span |
|---|---|---|
| Tokyo, JP | 3 | 2001–2006 |
| Toyama, JP | 1 | 2018 |