Inventor
Michael Rumer
Inventor
Santa Clara, CA, US
Overview
Patents· 4 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1021%
C23CCoating metallic material16%
H01LSemiconductor devices16%
H01JElectric discharge tubes or discharge lamps11%
G01NInvestigating or analysing materials by determining their chemical or physical properties5%
G02BOptical elements, systems or apparatus5%
G06FElectric digital data processing5%
G06NComputing arrangements based on specific computational models5%
G06TImage data processing or generation, in general5%
H10BElectronic memory devices5%
PatentTitleYear
10,895,539In-situ chamber clean end point detection systems and methods using computer vision systems202110,832,936Substrate support with increasing areal density and corresponding method of fabricating20209,938,616Physical vapor deposition of low-stress nitrogen-doped tungsten films20187,037,830'PVD deposition process for enhanced properties of metal films'2006Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2006Patents assigned to NOVELLUS SYSTEMS INC (1)· patent assignee history
2006–2021Based in Santa Clara, CA, US· patent location history
2018–2021Patents assigned to LAM RES CORP (3)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| LAM RES CORP | 3 | 2018–2021 |
| NOVELLUS SYSTEMS INC | 1 | 2006 |
Locations
| Location | Patents | Span |
|---|---|---|
| Santa Clara, California, US | 4 | 2006–2021 |