Inventor

Mark A. McCord

Inventor

Los Gatos, CA, US

Overview

55→

Patents

1990–2021

Patent span

Physics

Primary field (CPC G)

Patents· 55 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Jprimary

H01JElectric discharge tubes or discharge lamps29%

G01NInvestigating or analysing materials by determining their chemical or physical properties11%

G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices9%

B82YSpecific uses or applications of nanostructures7%

G01SRadio direction-finding7%

G01RMeasuring electric variables5%

G06TImage data processing or generation, in general5%

G21KHandling of particles or ionising radiation not otherwise provided for3%

B60RVehicles, vehicle fittings, or vehicle parts, not otherwise provided for3%

G01QScanning-probe techniques or apparatus3%

PatentTitleYear

10,987,546Hydrodynamic human-powered propulsion mechanism2021 10,955,530Systems for vibration cancellation in a lidar system2021 10,935,637Lidar system including a transceiver array2021 10,921,431Apparatuses for scanning a lidar system in two dimensions2021 10,861,671Method and system for focus adjustment of a multi-beam scanning electron microscopy system2020 10,845,466Mounting apparatuses for optical components in a scanning lidar system2020 10,754,036Scanning illuminated three-dimensional imaging systems2020 10,690,754Scanning apparatuses and methods for a lidar system2020 10,481,266Multi-range three-dimensional imaging systems2019 10,460,905Backscattered electrons (BSE) imaging using multi-beam tools2019 10,451,740Scanning lidar systems for three-dimensional sensing2019 10,366,862Method and system for noise mitigation in a multi-beam scanning electron microscopy system2019 10,325,753Method and system for focus adjustment of a multi-beam scanning electron microscopy system2019 10,192,716Multi-beam dark field imaging2019 10,186,396Method and system for focus adjustment of a multi-beam scanning electron microscopy system2019 9,874,597Light-emitting device test systems2018 9,666,411'Virtual ground for target substrate using floodgun and feedback control'2017 9,529,279'Method and apparatus for inspecting a substrate'2016 9,366,524'Alignment sensor and height sensor'2016 9,347,824'Light collection optics for measuring flux and spectrum from light-emitting devices'2016 9,170,503'Method and apparatus for inspecting a substrate'2015 9,165,742'Inspection site preparation'2015 8,957,394'Compact high-voltage electron gun'2015 8,642,981'Electron microscope assembly for viewing the wafer plane image of an electron beam lithography tool'2014 8,614,427'Suspended membrane calibration sample'2013 8,373,144'Quasi-annular reflective electron patterning device'2013 8,253,119'Well-based dynamic pattern generator'2012 8,204,296'Methods for generating a standard reference die for use in a die to standard reference die inspection and methods for inspecting a wafer'2012 8,194,968'Methods and systems for using electrical information for a device being fabricated on a wafer to perform one or more defect-related functions'2012 8,106,355'Automated inspection using cell-cell subtraction perpendicular to stage motion direction'2012 8,089,051'Electron reflector with multiple reflective modes'2012 7,796,804'Methods for generating a standard reference die for use in a die to standard reference die inspection and methods for inspecting a wafer'2010 7,714,300'High-speed high-efficiency solid-state electron detector'2010 7,710,556'Inspection system'2010 7,660,687'Robust measurement of parameters'2010 7,514,681'Electrical process monitoring using mirror-mode electron microscopy'2009 7,507,959'Method for charging substrate to a potential'2009 7,465,922'Accelerating electrostatic lens gun for high-speed electron beam inspection'2008 7,446,320'Electronically-variable immersion electrostatic lens'2008 7,315,022'High-speed electron beam inspection'2008 7,176,468'Method for charging substrate to a potential'2007 7,171,038'Method and apparatus for inspecting a substrate'2007 7,091,486'Method and apparatus for beam current fluctuation correction'2006 6,828,571'Apparatus and methods of controlling surface charge and focus'2004 6,774,646'Electron beam inspection system using multiple electron beams and uniform focus and deflection mechanisms'2004 6,664,546'In-situ probe for optimizing electron beam inspection and metrology based on surface potential'2003 6,627,884'Simultaneous flooding and inspection for charge control in an electron beam inspection machine'2003 6,597,006'Dual beam symmetric height systems and methods'2003 6,586,736'Scanning electron beam microscope having an electrode for controlling charge build up during scanning of a sample'2003 6,342,156'Multi-segment continuous filtration system'2002 6,064,486'Systems, methods and computer program products for detecting the position of a new alignment mark on a substrate based on fitting to sample alignment signals'2000 5,932,966'Electron sources utilizing patterned negative electron affinity photocathodes'1999 5,150,392'X-ray mask containing a cantilevered tip for gap control and alignment'1992 4,992,728'Electrical probe incorporating scanning proximity microscope'1991 4,925,139'Mechanical stage support for a scanning tunneling microscope'1990

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1990Based in Yonkers, NY, US· patent location history

1991–1992Based in Mohegan Lake, NY, US· patent location history

1999–2016Based in Mountain View, CA, US· patent location history

2002Based in Warsaw, KY, US· patent location history

2003–2020Patents assigned to KLA TENCOR CORP (26)· patent assignee history

2003–2010Patents assigned to KLA TENCOR TECH CORP (11)· patent assignee history

2004–2021Based in Los Gatos, CA, US· patent location history

2012–2021Patents assigned to MCCORD MARK A (6)· patent assignee history

2012–2016Patents assigned to MCCORD MARK (4)· patent assignee history

2019–2021Patents assigned to CEPTON TECHNOLOGIES INC (8)· patent assignee history

Inventor activity

Assignee and location history derived from the patent record.

Assignees

Assignee	Patents	Span
KLA TENCOR CORP	26	2003–2020
KLA TENCOR TECH CORP	11	2003–2010
CEPTON TECHNOLOGIES INC	8	2019–2021
MCCORD MARK Aself	6	2012–2021
MCCORD MARKself	4	2012–2016

Locations

Location	Patents	Span
Los Gatos, California, US	37	2004–2021
Mountain View, California, US	14	1999–2016
Mohegan Lake, New York, US	2	1991–1992
Warsaw, KY, US	1	2002
Yonkers, New York, US	1	1990