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Inventor

ZHENKANG MAX LIANG

Inventor
SG

Overview

1→
Patents
2022
Patent span
Electricity
Primary field (CPC H)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Jprimary
H01JElectric discharge tubes or discharge lamps25%
H01LSemiconductor devices25%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1025%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1025%
PatentTitleYear
11,501,976Substrate processing method and substrate processing apparatus2022

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2022Patents assigned to TOKYO ELECTRON LTD (1)· patent assignee history
2022Based in SG· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD12022
Locations
LocationPatentsSpan
SG12022