Inventor
Joel Ng
Inventor
San Leandro, CA, US
Overview
Patents· 4 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G01Nprimary
G01NInvestigating or analysing materials by determining their chemical or physical properties38%
G01BMeasuring length, thickness or similar linear dimensions25%
G01JMeasurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light25%
H01JElectric discharge tubes or discharge lamps13%
PatentTitleYear
10,692,705Advanced optical sensor and method for detecting an optical event in a light emission signal in a plasma chamber20207,251,036'Beam splitter/combiner for optical metrology tool'20077,154,607'Flat spectrum illumination source for optical metrology'20067,027,158'Beam splitter/combiner for optical meterology tool'2006Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2006–2007Patents assigned to THERMA WAVE INC (3)· patent assignee history
2006–2020Based in San Leandro, CA, US· patent location history
2020Patents assigned to TOKYO ELECTRON LTD (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| THERMA WAVE INC | 3 | 2006–2007 |
| TOKYO ELECTRON LTD | 1 | 2020 |
Locations
| Location | Patents | Span |
|---|---|---|
| San Leandro, California, US | 4 | 2006–2020 |