Inventor
Emil Peter Schmitt-Weaver
Inventor
Eindhoven, NL
Overview
Patents· 8 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices89%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1011%
PatentTitleYear
10,866,527Methods and apparatus for monitoring a lithographic manufacturing process202010,684,557Method for adjusting actuation of a lithographic apparatus202010,627,729Calibration method for a lithographic apparatus202010,078,273Lithographic apparatus with data processing apparatus20189,971,251Lithography system and a machine learning controller for such a lithography system20189,715,181'Method of calibrating a lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product'20179,507,279'Method of operating a lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product'20167,952,685'Illuminator for a lithographic apparatus and method'2011Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2011–2020Patents assigned to ASML NETHERLANDS BV (8)· patent assignee history
2011Patents assigned to ZEISS CARL SMT AG (1)· patent assignee history
2011Based in Selkirk, NY, US· patent location history
2016–2020Based in Eindhoven, NL· patent location history
2018Based in Veldhoven, NL· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML NETHERLANDS BV | 8 | 2011–2020 |
| ZEISS CARL SMT AG | 1 | 2011 |
Locations
| Location | Patents | Span |
|---|---|---|
| Eindhoven, NL | 6 | 2016–2020 |
| Veldhoven, NL | 1 | 2018 |
| Selkirk, New York, US | 1 | 2011 |