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Inventor

Chun Yan

Inventor
San Jose, CA, US

Overview

1→
Patents
2021
Patent span
Electricity
Primary field (CPC H)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Jprimary
H01JElectric discharge tubes or discharge lamps33%
H01LSemiconductor devices33%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1033%
PatentTitleYear
11,043,393Ozone treatment for selective silicon nitride etch over silicon2021

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2021Patents assigned to BEIJING E TOWN SEMICONDUCTOR TECH CO LTD (1)· patent assignee history
2021Patents assigned to MATTSON TECH INC (1)· patent assignee history
2021Based in San Jose, CA, US· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
BEIJING E TOWN SEMICONDUCTOR TECH CO LTD12021
MATTSON TECH INC12021
Locations
LocationPatentsSpan
San Jose, California, US12021