Inventor
TORU MARUYAMA
Inventor
JP
Overview
Patents· 16 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
B24Bprimary
B24BMachines, devices, or processes for grinding or polishing29%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1024%
H01LSemiconductor devices7%
A61KPreparations for medical, dental or toiletry purposes5%
A61PSpecific therapeutic activity of chemical compounds or medicinal preparations5%
B08BCleaning in general5%
C07DHeterocyclic compounds5%
G01MTesting static or dynamic balance of machines or structures5%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests5%
F25BRefrigeration machines, plants or systems2%
PatentTitleYear
12,472,601Method of checking leakage of fluid and polishing apparatus202512,201,603Bicyclic compound and use thereof for medical purposes202512,062,563Substrate processing apparatus, substrate processing system, and substrate processing method202412,023,777Temperature regulating apparatus and polishing apparatus202411,992,915System for adjusting pad surface temperature and polishing apparatus202411,958,161Polishing apparatus having surface-property measuring device of polishing pad and polishing system202411,919,124Pad-temperature regulating apparatus, method of regulating pad-temperature, polishing apparatus, and polishing system202411,919,048Method of cleaning an optical film-thickness measuring system202411,898,940Leak detection system and inspection method for the system202411,839,947Pad-temperature regulating apparatus, and polishing apparatus202311,826,871Pad-temperature regulating apparatus, pad-temperature regulating method, and polishing apparatus202311,617,733Bicyclic compound and use thereof for medical purposes202311,517,940Substrate cleaning device202211,450,544Substrate processing apparatus, substrate processing system, and substrate processing method202211,383,345Cleaning apparatus for heat exchanger and polishing apparatus202211,262,105Cryocooler and cryocooler pipe system2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2025Patents assigned to EBARA CORP (13)· patent assignee history
2022Patents assigned to SUMITOMO HEAVY INDUSTRIES (1)· patent assignee history
2022–2025Based in JP· patent location history
2023–2025Patents assigned to ONO PHARMACEUTICAL CO (2)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| EBARA CORP | 13 | 2022–2025 |
| ONO PHARMACEUTICAL CO | 2 | 2023–2025 |
| SUMITOMO HEAVY INDUSTRIES | 1 | 2022 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 16 | 2022–2025 |