Inventor
SEUNGYOON LEE
Inventor
KR
Overview
Patents· 11 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices28%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1028%
H01LSemiconductor devices25%
G06FElectric digital data processing6%
H01QAntennas, i.e. radio aerials6%
H04BTransmission3%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h103%
PatentTitleYear
12,593,660Method of manufacturing semiconductor device202612,585,199Overlay correction method, and exposure method and semiconductor device manufacturing method including overlay correction method202612,567,897Reconfigurable intelligent surface forming multiple resonances202612,542,360Laminated patch antenna, antenna array, and antenna package202611,921,421Overlay correcting method, and photolithography method, semiconductor device manufacturing method and scanner system based on the overlay correcting method202411,796,923Overlay correction method, method of evaluating overlay correction operation, and method of fabricating semiconductor device using the overlay correction method202311,537,042Overlay correcting method, and photolithography method, semiconductor device manufacturing method and scanner system based on the overlay correcting method202211,526,087Method of manufacturing a semiconductor device202211,456,222Overlay correction method and semiconductor fabrication method including the same202211,422,455EUV exposure apparatus, and overlay correction method and semiconductor device fabricating method using the same202211,137,673EUV exposure apparatus, and overlay correction method and semiconductor device fabricating method using the same2021Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2021–2026Patents assigned to SAMSUNG ELECTRONICS CO LTD (11)· patent assignee history
2021–2026Based in KR· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| SAMSUNG ELECTRONICS CO LTD | 11 | 2021–2026 |
Locations
| Location | Patents | Span |
|---|---|---|
| KR | 11 | 2021–2026 |