Inventor

Robert F. McLoughlin

Inventor
Pelham, NH, US

Overview

30→
Patents
1994–2016
Patent span
Physics
Primary field (CPC G)

Patents· 30 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

Y10Tprimary
Y10TTechnical subjects covered by former us classification19%
G05DSystems for controlling or regulating non-electric variables18%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1011%
F04BPositive-displacement machines for liquids7%
G05BControl or regulating systems in general6%
F16KValves4%
G01FMeasuring volume, volume flow, mass flow or liquid level4%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices4%
B01FMixing, e.g. dissolving, emulsifying or dispersing3%
B05CApparatus for applying fluent materials to surfaces, in general3%
PatentTitleYear
9,262,361'I/O systems, methods and devices for interfacing a pump controller'20169,025,454'I/O systems, methods and devices for interfacing a pump controller'20158,939,428'Liquid flow controller and precision dispense apparatus and system'20158,430,120'Liquid flow controller and precision dispense apparatus and system'20138,172,546'System and method for correcting for pressure variations using a motor'20128,082,946'Liquid flow controller and precision dispense apparatus and system'20118,082,066'System for controlling valve fluid flow based on rate of change of close rate acceleration'20118,015,995'System and method for flow monitoring and control'20117,965,208'Auto ranging system and method for analog signal'20117,946,751'Method for controlled mixing of fluids via temperature'20117,940,664'I/O systems, methods and devices for interfacing a pump controller'20117,740,024'System and method for flow monitoring and control'20107,726,876'System and method for non-intrusive thermal monitor'20107,684,446'System and method for multiplexing setpoints'20107,610,117'System and method for flow monitoring and control'20097,543,596'Liquid flow controller and precision dispense apparatus and system'20097,494,265'System and method for controlled mixing of fluids via temperature'20097,476,087'Pump controller for precision pumping apparatus'20097,443,483'Systems and methods for fluid flow control in an immersion lithography system'20087,317,971'System for controlling fluid flow based on a valve break point'20087,249,628'Apparatus for conditioning the temperature of a fluid'20077,107,128'System for controlling fluid flow'20067,029,238'Pump controller for precision pumping apparatus'20066,973,375'System and method for flow monitoring and control'20056,617,079'Process and system for determining acceptibility of a fluid dispense'20036,527,862'Flow controller'20036,363,292'Universal track interface'20026,348,098'Flow controller'20025,932,987'Variable step rate precision pumping apparatus'19995,361,637'Temperature compensation circuitry employing a single temperature compensation element'1994

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1994Based in North Andover, MA, US· patent location history
1999–2016Based in Pelham, NH, US· patent location history
2002–2006Patents assigned to MYKROLIS CORP (5)· patent assignee history
2006–2016Patents assigned to ENTEGRIS INC (22)· patent assignee history
2011–2015Patents assigned to MCLOUGHLIN ROBERT F (5)· patent assignee history
2011–2015Patents assigned to GONNELLA GEORGE (4)· patent assignee history
2011–2013Patents assigned to LAVERDIERE MARC (3)· patent assignee history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
ENTEGRIS INC222006–2016
MCLOUGHLIN ROBERT Fself52011–2015
MYKROLIS CORP52002–2006
GONNELLA GEORGE42011–2015
LAVERDIERE MARC32011–2013
Locations
LocationPatentsSpan
Pelham, NH, US291999–2016
North Andover, Massachusetts, US11994