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Inventor

Yoichiro Tamiya

Inventor
Higashimurayama, JP

Overview

3→
Patents
1986–1988
Patent span
Physics
Primary field (CPC G)

Patents· 3 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices50%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1050%
PatentTitleYear
4,780,606'Projection aligner method utilizing monitoring of light quantity'19884,701,608'Projection aligner with a sensor for monitoring light quantity'19874,598,197'Projection aligner'1986

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1986–1988Patents assigned to HITACHI LTD (3)· patent assignee history
1986Patents assigned to HITACHI OME ELECTRONIC CO (1)· patent assignee history
1986–1988Based in Higashimurayama, JP· patent location history
1987Patents assigned to HITACHI TOKYO ELECTRONICS (1)· patent assignee history
1988Patents assigned to HITACHI OME ELECTRONIC CO INC (1)· patent assignee history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
HITACHI LTD31986–1988
HITACHI OME ELECTRONIC CO11986
HITACHI OME ELECTRONIC CO INC11988
HITACHI TOKYO ELECTRONICS11987
Locations
LocationPatentsSpan
Higashimurayama, JP31986–1988