Inventor
Klaus Freischlad
Inventor
Tucson, AZ, US
Overview
Patents· 19 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G01Bprimary
G01BMeasuring length, thickness or similar linear dimensions32%
G06TImage data processing or generation, in general24%
Y10TTechnical subjects covered by former us classification21%
G01NInvestigating or analysing materials by determining their chemical or physical properties18%
H01SDevices using the process of light amplification by stimulated emission of radiation [laser] to amplify or generate light3%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h103%
PatentTitleYear
10,018,572Front quartersphere scattered light analysis20189,528,942'Front quartersphere scattered light analysis'20169,488,591'Front quartersphere scattered light analysis'20169,110,033'Front quartersphere scattered light analysis'20158,797,537'Interferometer with a virtual reference surface'20148,330,947'Back quartersphere scattered light analysis'20127,605,913'System and method for inspecting a workpiece surface by analyzing scattered light in a front quartersphere region above the workpiece'20097,583,386'Method and apparatus for optically analyzing a surface'20097,428,056'Method and apparatus for optically analyzing a surface'20087,408,649'Method and apparatus for optically analyzing a surface'20086,847,458'Method and apparatus for measuring the shape and thickness variation of polished opaque plates'20056,844,929'Apparatus and method for holding and transporting thin opaque plates'20056,184,994'Method and apparatus for absolutely measuring flat and sperical surfaces with high spatal resolution'20016,061,133'Interferometer light source'20005,737,081'Extended-source low coherence interferometer for flatness testing'19985,357,341'Method for evaluating interferograms and interferometer therefor'19945,311,599'Method and apparatus for optical testing of samples'19945,185,810'Method for optical testing of samples'19935,042,041'Radiation source for partially coherent radiation'1991Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1991–1994Patents assigned to ZEISS STIFTUNG (4)· patent assignee history
1991–1994Based in Aalen, DE· patent location history
1994Based in Aalen-Unterkochen, DE· patent location history
1998–2018Based in Tucson, AZ, US· patent location history
2000–2005Patents assigned to PHASE SHIFT TECHNOLOGY (2)· patent assignee history
2008Patents assigned to KLA TENCOR TECH CORP (2)· patent assignee history
2009–2018Patents assigned to KLA TENCOR CORP (7)· patent assignee history
2012–2015Patents assigned to JUDELL NEIL (2)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| KLA TENCOR CORP | 7 | 2009–2018 |
| ZEISS STIFTUNG | 4 | 1991–1994 |
| JUDELL NEIL | 2 | 2012–2015 |
| KLA TENCOR TECH CORP | 2 | 2008 |
| PHASE SHIFT TECHNOLOGY | 2 | 2000–2005 |
Locations
| Location | Patents | Span |
|---|---|---|
| Tucson, AZ, US | 15 | 1998–2018 |
| Aalen, DE | 3 | 1991–1994 |
| Aalen-Unterkochen, DE | 1 | 1994 |