Inventor
YANFU LU
Inventor
US
Overview
Patents· 4 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
C23Cprimary
C23CCoating metallic material22%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1022%
H01LSemiconductor devices17%
C30BSingle-crystal growth11%
G01JMeasurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light11%
G01KMeasuring temperature6%
G05DSystems for controlling or regulating non-electric variables6%
H10DInorganic electric semiconductor devices6%
PatentTitleYear
12,564,001Dual pyrometer systems for substrate temperature control during film deposition202612,163,227Film deposition systems and methods202412,057,314Methods for silicon germanium uniformity control using multiple precursors202411,959,173Methods of forming structures, semiconductor processing systems, and semiconductor device structures2024Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2024–2026Patents assigned to ASM IP HOLDING BV (4)· patent assignee history
2024–2026Based in US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASM IP HOLDING BV | 4 | 2024–2026 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 4 | 2024–2026 |